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Book Details
Mems and Nems: Systems, Devices, and Structures
Author(s) :Sergey Edward Lyshevski

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ISBN : 9780849312625
Name : Mems and Nems: Systems, Devices, and Structures
Price : Currency 1095.00
Author/s : Sergey Edward Lyshevski
Type : Text Book
Pages : 461
Year of Publication : Rpt. 2010
Publisher : Taylor & Francis/BSP Books
Binding : Paperback
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Contents

1. Overview and Introduction 2. New Trends in Engineering and Science: Micro- and Nanoscale Systems 3. Fundamentals of MEMS Fabrication 4. Devising and Synthesis of MEMS AND NEMS 5. Modeling of Micro- and Nanoscale Electromechanical Systems, Devices, and Structures 6. Nanosystems, Quantum Mechanics, and Mathematical Models 7. Control of Micro electro mechanical Systems 8. Case Studies: Synthesis, Analysis, Fabrication, and Computer-Aided Design of MEMS

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